Commit a112e29d authored by Filippos Tourlomousis's avatar Filippos Tourlomousis

Update workflow-Si-Glass-Device-Fabrication.md

parent a2f3663f
......@@ -14,7 +14,7 @@
- If you want to do piranha cleaning, you need to buy those 2"-4" cassettes
- Open Coallia and turn machine ON
- Check for the mounts to be appropriate for anodic bonding
- 6" mount you can put 3 pairs (Si-glass) of 2" wafers
- 6" mount you can put 3 pairs (Si-glass) of 2" wafers with Si and glas on top of it
- Apply 50 N normal force
- Turn ON Heat: 325 deg C - usually it takes 15 min
- Turn ON Power: 625 Volts
......
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